Berlin 2008 – wissenschaftliches Programm
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HL: Fachverband Halbleiterphysik
HL 31: Poster II
HL 31.30: Poster
Dienstag, 26. Februar 2008, 16:30–19:00, Poster D
Low contact resistance for dielectrophoretically aligned carbon nanotubes — •Anindya Majumder1, Markus Regler1,2, and Achim Wixforth1,2 — 1Lehrstuhl fuer Experimentalphysik 1, Institut fuer Physik, Universitaet Augsburg, Universitaet. 1, 18569 Augsburg — 2Center fir Nanoscience, Geschwister-Scholl-Platz 1, 80539 Muenchen
Reduction of contact resistance between carbon nanotubes (CNT) and metal electrodes holds significance for its application in nanoscale electronic devices. Presently, this resistance is very high for samples where dielectrophoresis (DEP) for CNT alignment between contact electrodes is employed. Thus, we need to have more transparent contacts.
In this work, electrodes of different material (Pd, Au, Ti, Al) were processed on a piezoelectric LiNbO3- substrate. The CNT have been aligned between them by DEP. These were subjected to annealing in the temperature range of 300-700° C in vacuum and different background gases. The resistance was then measured at room temperature, where a significant change in the contact resistance between the CNT and the electrodes was found. The goal was to optimize the annealing parameters, improve stability and reproducibility and look for other probable techniques.