Berlin 2008 – wissenschaftliches Programm

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HL: Fachverband Halbleiterphysik

HL 46: Transport in high magnetic field/quantum-Hall-effect

HL 46.3: Vortrag

Donnerstag, 28. Februar 2008, 12:15–12:30, EW 202

Fibre optical interferometer for analysis of microelectromechanicalsystems — •Tjark Windisch, Martin Borowski, Marc A. Wilde, and Dirk Grundler — Physik Department E10, Technische UniversitätMünchen, James-Franck-Strase 1, D-85748 Garching

We realize a system for measurements on microelectromechanicalsystems (MEMS) based on a fibre optical interferometer. Our system is designed for low-temperature(<300 mK) and high-field (>15 T) measurements and includes a piezoelectrical positioning system (x,y,z  and  θ) with spatial resolution up to 200 nm. To minimize the external mechanical noise the system is embedded in an active piezoelectric vibration isolation system. The positioning system allows us to position in situ the fibre in relation to the micron sized samples. The goniometer enables us to adjust the tiltangle between the fibre and the sample which reduces the scattering losses and thus increases the signal-to-noise ratio.

By this, we can detect the static deflection of a MEMS device with spatial resolution up to 200 nm as well as detect the shift in the eigenfrequencies. The system is in particular designed to perform de Haas-van Alphen-effect measurements on miniaturized cantilever magnetometers (MCMs). First results are shown.

We thank Jan-Ivo Springborn and Niels Ruhe for technical assistance and the German Excellence Initiative for financial support via ”Nanosystems Initiative Munich (NIM)”.