Regensburg 2010 – wissenschaftliches Programm

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O: Fachverband Oberflächenphysik

O 59: Poster Session II (Nanostructures at surfaces: Dots, particles, clusters; Nanostructures at surfaces: arrays; Nanostructures at surfaces: Wires, tubes; Nanostructures at surfaces: Other; Plasmonics and nanooptics; Metal substrates: Epitaxy and growth; Metal substrates: Solid-liquid interfaces; Metal substrates: Adsoprtion of organic / bio molecules; Metal substrates: Adsoprtion of inorganic molecules; Metal substrates: Adsoprtion of O and/or H; Metal substrates: Clean surfaces; Density functional theory and beyond for real materials)

O 59.22: Poster

Mittwoch, 24. März 2010, 17:45–20:30, Poster B1

Ion induced surface topography evolution of Cu — •Maria Lenius¹, Reiner Kree², and Cynthia A. Volkert¹ — ¹Institut für Materialphysik, Georg-August-Universität Göttingen — ²Institut für Theoretische Physik, Georg-August-Universität Göttingen

Ion beam sputtered surfaces develop complex patterns that depend on crystal and ion beam parameters. The patterns are controlled by the interplay of various mechanisms such as surface curvature dependent sputtering, channelling effects, anisotropic and temperature dependent diffusion as well as ion induced diffusion processes and are not fully understood.

This work systematically considers the influence of crystal orientation dependent surface energy as a driving force. The sputter erosion profiles of Cu grains with various crystal orientations have therefore been investigated as a function of dose and ion beam incidence using a focused ion beam microscope. The resulting patterns with amplitudes up to 150 nm and wavelengths of about 0.5 um were characterized using SEM, AFM, and EBSD. Those investigations provide indications that surface energy minimization has an impact on pattern formation.