Kiel 2011 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 17: Poster: Plasmatechnologie

P 17.9: Poster

Mittwoch, 30. März 2011, 16:30–18:30, Foyer

Comparison of calorimetric plasma diagnostics in a plasma downstream reactor — •Sven Bornholdt¹, Christian Roth², Veronika Zuber², Axel Sonnenfeld², Philipp Rudolf von Rohr², and Holger Kersten¹ — ¹Christian-Albrechts-University Kiel, Institute of Experimental and Applied Physics, 24098 Kiel, Germany — ²ETH Zurich, Institute of Process Engineering, 8092 Zurich, Switzerland

The energy influx in the afterglow of a plasma downstream reactor (PDR) which is used for treatment and modification of powders has been measured by two different calorimetric probe types. The radio frequency discharge has been investigated for oxygen (10 - 100 %) - argon (90 - 0 %) mixtures at relatively high gas flow rates (750 - 3000 sccm) and pressures (100 - 350 Pa). The main process parameters influencing the energy influx are the plasma power, the system pressure and the total gas flow rate. The first (classical) probe measures the temperature slope of a metal substrate dummy by a thermocouple, while the second (fiber optic) probe measures the temperature dependent band edge displacement of a GaAs crystal. Although the size, geometry and material of the used probe types are different, comparable energy flux values are achieved. Depending on the process parameters and oxygen admixtures, energy fluxes between 100 and 3500 W/m² were measured. The variation of the pressure and total gas flow rate suggests a highly flow dependent plasma density distribution in the process reactor.