Regensburg 2013 – wissenschaftliches Programm

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DS: Fachverband Dünne Schichten

DS 11: Poster Session I: Application of thin films; Ion beam induced surface patterns; Ion and electron beam induced processes; Micro- and nanopatterning (jointly with O)

DS 11.21: Poster

Montag, 11. März 2013, 17:00–20:00, Poster B1

Scanning Tunnelling Spectroscopy of FIB-induced Local Phase Changes in Tetrahedral Amorphous-Carbon — •Frederik Klein¹, Peter Philipp², Lothar Bischoff², and Thomas Mühl¹ — ¹Leibniz-Institut für Festkörper- und Werkstoffforschung Dresden — ²Institut für Ionenstrahlphysik und Materialforschung, Helmholtz-Zentrum Dresden-Rossendorf

Ion irradiation of tetrahedral amorphous-carbon leads to both an ion implantation and a local phase change of the carbon. The latter is equivalent to an increase of the carbon sp2/sp3 bond ratio. It is caused by the deposition of the ion energy and leads to an increased electrical conductivity. We perform spatially resolved scanning tunneling spectroscopy in order to investigate the impact of different ion species (Ga, Si, Ge, Au). A direct contribution of the implanted metal will be carefully considered.