Regensburg 2022 – wissenschaftliches Programm
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DS: Fachverband Dünne Schichten
DS 1: Thin Film Properties: Structure, Morphology and Composition (XRD, TEM, XPS, SIMS, RBS, AFM, ...) 1
DS 1.1: Vortrag
Montag, 5. September 2022, 09:30–09:45, H14
Low-energy ion channeling in nanocubes — •Shiva Choupanian1, Wolfhard Möller2, Martin Seyring1, and Carsten Ronning1 — 1Institute of Solid State Physics, Friedrich Schiller University Jena — 2Helmholtz-Zentrum Dresden-Rossendorf
Focused ion beam (FIB) processing with low-energy ions has become a standard technique for the manipulation of nanostructures. Many underlying ion beam effects that deviate from conventional high-energy ion irradiation of bulk systems are considered today; however, ion channeling with its consequence of significant deeper penetration depth has been only theoretically investigated in this regime. We present here an experimental approach to determine the channeling of low-energy ions in crystalline nanoparticles by measuring the sputter yield derived from SEM images taken after irradiation under various incident ion angles. Channeling maps of 30 and 20 keV Ga+ ions in Ag nanocubes have been identified and fit well with the theory. Indeed, channeling has a significant impact on the transport of energetic ions in crystals due to the large critical angle at low ion energies, thus being relevant for any FIB-application. Consequently, the obtained sputter yield clearly differs from amorphous materials; therefore, it is recommended not to rely only on, e.g., ion distribution depths predicted by standard Monte-Carlo (MC) algorithms for amorphous materials.