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DS: Fachverband Dünne Schichten

DS 23: High-k and Low-k Dielectrics I (Joint Session DS/DF)

Mittwoch, 24. März 2010, 09:30–11:00, H8

09:30 DS 23.1 Spectroscopic investigations of interaction between C60 fullerene and nitrogen atom from amine group — •Jolanta Klocek, Daniel Friedrich, Kostyantyn Zagorodniy, and Dieter Schmeisser
09:45 DS 23.2 The influence of elastic and inelastic processes on trap assisted tunnelling through thin dielectric films — •Grzegorz Kozlowski, Jarek Dabrowski, Piotr Dudek, Gunther Lippert, and Grzegorz Lupina
10:00 DS 23.3 Electrically optimized high-κ metal gate MOSFET by specific modification of the band alignment — •Łukasz Starzyk, Massimo Tallarida, and Dieter Schmeißer
10:15 DS 23.4 A comparison of (SrO)x(ZrO2)(1−x) and ZrO2 as potential high-k dielectric for future memory applications — •Matthias Grube, Dominik Martin, Walter Michael Weber, Thomas Mikolajick, Lutz Geelhaar, and Henning Riechert
10:30 DS 23.5 Nanoscale analysis of the electric properties of ultra thin ZrO2-, (ZrO2)x(Al2O3)1−x- and ZrO2/Al2O3/ZrO2-films. — •Dominik Martin, Matthias Grube, Elke Erben, Wenke Weinreich, Uwe Schröder, Lutz Geelhaar, Walter Weber, Henning Riechert, and Thomas Mikolajick
10:45 DS 23.6 Atomic Vapour Deposition of TiTaO for MIM applications — •Mindaugas Lukosius, Canan Baristiran Kaynak, Christian Wenger, Günther Ruhl, and Simon Rushworth
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DPG-Physik > DPG-Verhandlungen > 2010 > Regensburg