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HL: Fachverband Halbleiterphysik
HL 30: Poster I
HL 30.26: Poster
Dienstag, 17. März 2020, 13:30–15:45, P3
Simulation of Magnetoelectric Microbeams — Simeon Katzer1, Bernd Hähnlein1, •Maximilian Krey2, Katja Tonisch1, Stefan Krischok1, and Hannes Toepfer2 — 1Technical Physics 1 Group, Technische Universität Ilmenau, Germany — 2Advanced Electromagnetics Group, Technische Universität Ilmenau, Germany
Magnetic field sensors cover a wide field of applications, for example in bio-medicine, non-destructive testing or geo-exploration. In terms of sensitivity, super conductive quantum interference devices (SQUIDs) are state of the art, but with the disadvantage of the necessary liquid helium cooling in order to reach a super conductive state. Thus, our research efforts focus on the development of magnetic field sensors based on magnetoelectric resonant MEMS for room temperature operation. In beam-like structures a combination of piezoelectric and magnetostrictive materials is used to convert the magnetic field input in an electrically measurable output. The sensor principle is based on an eigenfrequency shift of the structure under the influence of a magnetic field. Simulations of this behavior require the consideration of aspects such as material science, mechanical vibrations, magnetism, electricity as well as mutual effects like piezoelectricity, magnetostriction and the Delta-E- effect. Due to the multi-physics problem many degrees of freedom arise, which can be used to optimize the structure for maximum output signal amplitude and frequency shift. We present an investigation targeting a simulative description of a magnetoelectric sensor based on scandium aluminum nitride with Comsol Multiphysics.