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DS: Fachverband Dünne Schichten

DS 23: Lithography II: Focused Electron Beam Induced Processing: 3D Nano-Printing for Material Science (Focussed Session): Afternoon Session (joint session DS/KFM)

Wednesday, March 14, 2018, 15:00–18:00, H 2032

Considering 3D printing using fused-deposition modeling or higher-resolution variants with lasers applicable to polymers and metals, an analogous approach exists on the nanometer scale. With the aid of focused electron beam-induced deposition (FEBID) it is possible to create solid-state structures on the nanoscale. However, in contradistinction to large-scale 3D printing of simple plastic or metallic structures, FEBID is able to directly provide nano-materials with a wealth of interesting electronic, optical and magnetic properties. Due to this, focused electron beam-induced deposition has experienced a rapid expansion in the breadth of its application fields over the last 10 years. FEBID uses precursor gases which, being adsorbed on a surface, are dissociated in the focussed electron beam to form the deposit. Intensive research has pushed the capabilities of FEBID in two important areas. It is now possible to obtain fully metallic nanostructures of Fe, Co and FeCo-alloys and also of Au and Pt. In addition, very recently the simulation-guided nano-manufacturing of 3D structures has matured to such a degree that even complex 3D objects can now be fabricated under controlled conditions. The focused session will address these new developments spanning the range from the fundamentals of electron-precursor interaction, covering aspects of the rational design of optimized precursors, and showing recent work on superconducting, magnetic and plasmonically active materials, both in 2D and 3D.

Organized by

Name: Prof. Dr. Michael Huth, Institution: Physikalisches Institut, Goethe-Universität, City: Frankfurt am Main, Country: Germany, Email: michael.huth@physik.uni-frankfurt.de, Telephone number: +49-69-798-47235

Name: Ass. Prof. Dr. Harald Plank, Institution: Institut für Elektronenmikroskopie und Nanoanalytik, TU Graz, City: Graz, Country: Austria, Email: harald.plank@felmi-zfe.at, Telephone number: +43-316-873-8821

Name: Dr. Ivo Utke, Institution: EMPA, Swiss Laboratories for Materials Science and Technology, City: Thun, Country: Switzerland, Email: Ivo.Utke@empa.ch, Telephone number: +41-58-765-6257

15:00 DS 23.1 FEBIP on Metal-Organic Frameworks — •Christian Preischl, Elif Bilgilisoy, Florian Vollnhals, Kai Ahlenhof, Petra Swiderek, Hartmut Gliemann, Christof Wöll, and Hubertus Marbach
15:15 DS 23.2 Focused Electron Beam Induced Deposition with halogenated organometallic Ru compounds — •Jakub Jurczyk, Christopher Brewer, Olivia Hawkins, Czeslaw Kapusta, Lisa McElwee-White, and Ivo Utke
15:30 DS 23.3 Electron-induced reactions of surface-grown metal organic layers — •Kai Ahlenhoff and Petra Swiderek
15:45 DS 23.4 Tuning and in-situ monitoring the hall resistance of ferromagnetic FEBID structures — •Roland Sachser and Michael Huth
16:00 DS 23.5 Purified and crystalline three-dimensional electron-beam-induced deposits: the successful case of cobaltJavier Pablo-Navarro, César Magén, and •José María De Teresa
16:15 DS 23.6 Exploring new copper complexes for FEBID — •Luisa Berger, Katarzyna Madajska, Nils Boysen, Iwona Barbara Szymánska, Anjana Devi, and Ivo Utke
  16:30 15 min. break.
16:45 DS 23.7 Dedicated AS-ALD micro-reactor for FEBID nano-templates — •Peter Gruszka, Giorgia Di Prima, Roland Sachser, and Michael Huth
17:00 DS 23.8 Fabrication of multi-component nanostructures by FEBID — •Fabrizio Porrati, Roland Sachser, Sven Barth, Gian Carlo Gazzadi, Stefano Frabboni, Christian Gspan, Harald Plank, Andreas Terfort, and Michael Huth
17:15 DS 23.9 Ac response of nano-granular metals prepared via FEBID — •Marc Hanefeld and Michael Huth
17:30 DS 23.10 Energy collection from green-house infra-red emission using nanogranular compoundmaterials — •Koops Hans Wilfried Peter
17:45 DS 23.11 Coordination compounds for focused electron beam induced deposition (FEBID) — •Iwona Szymańska. and Katarzyna Madajska
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