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DS: Fachverband Dünne Schichten

DS 19: Focus Session: Direct-Write Nanofabrication and Applications II
(Electron Beam Induced Processing) (joint session DS/TT)

Mittwoch, 3. April 2019, 15:00–18:00, H32

Part II: New Approaches & Chemsitry
Organizers:
• Michael Huth, Physikalisches Institut, Goethe-Universität, Frankfurt, Germany
• Harald Plank, FELMI-ZFE, TU Graz, Austria
(Synopsis provided with part I of this session)

15:00 DS 19.1 Hauptvortrag: Fabrication of functional nanostructures by electron and ion beams — •Milos Toth
15:30 DS 19.2 Avoiding amorphization in silicon nano structures — •Gregor Hlawacek, Xiaomo Xu, Hans-Jürgen Engelmann, Karl-Heinz Heinig, Wolfhard Möller, Ahmed Gharbi, Raluca Tiron, Lothar Bischoff, Thomas Prüfer, Rene Hübner, Stefan Facsko, and Johannes von Borany
15:45 DS 19.3 Non-classical Liquid Metal Ion Sources for advanced FIB nano-patterning — •Paul Mazarov, Lothar Bischoff, Wolfgang Pilz, Nico Klingner, Achim Nadzeyka, Jorg Stodolka, and Jacques Gierak
16:00 DS 19.4 Opening the Door to New Beam Induced Processing Applications: A Compact and Flexible Gas Injection System — •Andrew Jonathan Smith, Klaus Schock, Andreas Rummel, and Stephan Kleindiek
16:15 DS 19.5 FXBID - an X-ray based sibling to FEBIP — •Andreas Späth, Kim Thomann, Florian Vollnhals, Jörg Raabe, Kevin C. Prince, Robert Richter, Wolfgang Hieringer, Hubertus Marbach, and Rainer H. Fink
  16:30 15 min. break
16:45 DS 19.6 Hauptvortrag: Fundamentals of low-energy electron induced dissociation of focused electron beam induced deposition precursors — •Oddur Ingólfsson
17:15 DS 19.7 Which molecular structures in metal organic compounds are favourable for electron-induced decomposition?Kai Ahlenhoff and •Petra Swiderek
17:30 DS 19.8 Cisplatin as potential Pt FEBID precursor: NH3 ligands enhance the electron-induced removal of chlorine — •Markus Rohdenburg, Kai Ahlenhoff, Sascha Koch, Armin Gölzhäuser, and Petra Swiderek
17:45 DS 19.9 Amidinate and carboxylate coordination compounds for focused electron beam induced deposition (FEBID)Katarzyna Madajska and •Iwona Szymańska
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DPG-Physik > DPG-Verhandlungen > 2019 > Regensburg